01.

Joint Tech Evaluation of Advanced Etching Processes II

11.

Joint Tech Evaluation of Advanced Etching Processes I

12.

Establishment of U.S. Headquarters

08.

Obtain special gas facility certification

07.

Utility Facility Expansion

05.

ISO9001 certification

02.

Moving and Expanding to the 100 Class Cleanroom

07.

System Product Development

05.

Certification of Venture Business

12.

Establishment of the R&D department

11.

Test Product Development

09.

Factory relocation

07.

Establishment of the corporation